From rpu at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: rpu at snf.stanford.edu (rpu at snf.stanford.edu)
Date: Jul 11, 2000
Subject: Problem drytek4: 
Message-ID: <mailman.0.1357938321.25694.drytek4-pcs@snf.stanford.edu>

The green light of standby can't turn on, but the machine works fine.



From booth at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 12, 2000
Subject: Problem Clear drytek4: replaced bulb
Message-ID: <mailman.1.1357938321.25694.drytek4-pcs@snf.stanford.edu>




From mcvittie at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Sep 14, 2000
Subject: Shutdown drytek4: Comp Air leak. Comp Air is shut off
Message-ID: <mailman.2.1357938321.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 14, 2000
Subject: Shutdown Clear drytek4: air is back on...
Message-ID: <mailman.3.1357938321.25694.drytek4-pcs@snf.stanford.edu>




From lin at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: lin at snf.stanford.edu (lin at snf.stanford.edu)
Date: Sep 22, 2000
Subject: Problem drytek4: after hitting the standby button, drytek 4 keeps hissing
Message-ID: <mailman.4.1357938321.25694.drytek4-pcs@snf.stanford.edu>

When I tried to load a wafer by taking the machine out 
of standby mode, the machine just keeps hissing.



From lin at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: lin at snf.stanford.edu (lin at snf.stanford.edu)
Date: Sep 22, 2000
Subject: Shutdown drytek4: can not load wafers, solenoid keep hissing
Message-ID: <mailman.5.1357938321.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 25, 2000
Subject: Shutdown Clear drytek4: changed leaking by solenoid
Message-ID: <mailman.6.1357938321.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 25, 2000
Subject: Problem Clear drytek4: changed leaking by solenoid
Message-ID: <mailman.7.1357938321.25694.drytek4-pcs@snf.stanford.edu>




From bogus@does.not.exist.com  Fri Jan 11 13:05:22 2013
From: bogus@does.not.exist.com ()
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: No subject
Message-ID: <mailman.597.1357938327.25694.drytek4-pcs@snf.stanford.edu>

QUIT
Received: from wunsich (unknown [248.166.163.18])
	by computer.com (Postfix) with ESMTP id 64EEEDDC78C
	for <drytek4-pcs at snf.stanford.edu>; Tue, 4 Nov 2008 09:49:09 -0000
Date: Tue, 4 Nov 2008 17:49:09 +0800
From: "=?GB2312?B?ya3QzNXixf2+4A==?=" <kiadjgu at zfrdmpxyd.info>
To: "drytek4-pcs" <drytek4-pcs at snf.stanford.edu>
Subject: =?GB2312?B?08q8/si6t6Kw78Tjw6Y=?=
X-Mailer: Foxmail 5.0 [cn]
Mime-Version: 1.0
Content-Type: text/html;
	charset="GB2312"
Content-Transfer-Encoding: base64
Content-Disposition: inline
Message-Id: <20081104094909.64EEEDDC78C at computer.com>
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From maxms at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: maxms at snf.stanford.edu (maxms at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-08-12 10:27:15: will not pump down
Message-ID: <27350423.0.1344792436418.JavaMail.coral@shine>

eevn with microreset


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-08-12 10:27:15: will not pump down
Message-ID: <7141756.4.1344824453824.JavaMail.coral@shine>

Found blower power breaker tripped. Reset breaker and turn 
on blower, will monitor blower before releasing tool.


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-08-12 19:57:45: Ok to use
Message-ID: <13370774.5.1344826665298.JavaMail.coral@shine>

Monitored pump blower for 1hrs, no problem encountered.
Tool is ok to use..


From eenriquez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Shutdown drytek4 SNF 2012-08-17 16:24:49: no process cooling water
Message-ID: <23454543.165.1345245889874.JavaMail.coral@shine>



From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Shutdown drytek4 SNF 2012-08-17 16:24:49: no process cooling
 water
Message-ID: <20728565.187.1345250543981.JavaMail.coral@shine>

System back to normal operation.


From eenriquez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-08-30 10:56:04: Cleaned the upper
 electrode
Message-ID: <32449996.125.1346349364831.JavaMail.coral@shine>

Cleaned the upper electrode and ran qual test wafers.


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2011-12-11 12:49:27: Purging
Message-ID: <29048372.4.1347891195981.JavaMail.coral@shine>

When system doesn't operate normal, press micro reset buttom.


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-03-28 10:35:24: Completed monthly pm
Message-ID: <25484824.5.1347891238031.JavaMail.coral@shine>

old information.


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-07-02 09:52:23: Pumping out the C4F8
Message-ID: <8958131.6.1347891262059.JavaMail.coral@shine>

compledted.


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-08-12 19:57:45: Ok to use
Message-ID: <23826108.7.1347891362138.JavaMail.coral@shine>

completed.


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-07-19 08:13:24: Update
Message-ID: <23789587.8.1347891374156.JavaMail.coral@shine>

completed


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-08-30 10:56:04: Cleaned the upper
 electrode
Message-ID: <24381839.9.1347891399175.JavaMail.coral@shine>

Test were nromal


From jperez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-02-09 11:51:05: Test Qual was GOOD
Message-ID: <18536332.10.1347891434204.JavaMail.coral@shine>

Old data


From kcbalram at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-09-19 09:18:45: Problems during etch
Message-ID: <4606258.33.1348071526315.JavaMail.coral@shine>

1) Could not strike a plasma on process 3, running O2 descum 100sccm, 100mT, 100W. Process 2 was OK
2) The voltage bias was showing OL (overload). Etch seemed to be OK
3) CHF3 valve was loose. Elmer fixed it. 


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-09-19 09:18:45: Problems during etch
Message-ID: <20580660.0.1348434236128.JavaMail.coral@shine>

After rebooting the system the bias voltage reading is back,
using process #1 O2(100sccm) pressure (150mt) power
(100) bias reading is -2.257


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-07-23 18:17:55: On "process1",no O2
 flow
Message-ID: <25903086.1.1348434893511.JavaMail.coral@shine>

Process#1 is working again, changed u14(sn7409) it
control the process select. Cycled 5x w/out problem..


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-07-29 20:09:59: Update
Message-ID: <1119464.26.1348622728399.JavaMail.coral@shine>



From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-07-24 08:46:42: Update Process 1
Message-ID: <24364335.27.1348622734468.JavaMail.coral@shine>



From kcbalram at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-09-27 15:47:57: RF on LED not working
Message-ID: <10098137.78.1348786077528.JavaMail.coral@shine>



From mdickey at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-09-27 15:47:57: RF on LED not working
Message-ID: <10071809.91.1348850737109.JavaMail.coral@shine>

Replaced light


From clee58 at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-09-29 23:53:41: pressure is not stable.
 fluctuated
Message-ID: <20690102.106.1348988022231.JavaMail.coral@shine>

pressure is not stable. fluctuated


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-09-29 23:53:41: pressure is not
 stable. fluctuated
Message-ID: <11326932.1.1349038340747.JavaMail.coral@shine>



From janp at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: janp at snf.stanford.edu (janp at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-10-05 13:33:13: No RF power
Message-ID: <6928481.21.1349469193610.JavaMail.coral@shine>

RF is not turning on


From janp at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: janp at snf.stanford.edu (janp at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-10-05 13:40:17: RF works
Message-ID: <20932521.28.1349469617741.JavaMail.coral@shine>

Turning power supply off and on again, + micro reset fixed it


From eenriquez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-10-05 13:33:13: No RF power
Message-ID: <25175878.34.1349475335013.JavaMail.coral@shine>

User resolved the problem


From eenriquez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-10-05 13:40:17: RF works
Message-ID: <5726333.35.1349475344600.JavaMail.coral@shine>

archived


From clee58 at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-10-12 18:00:08: The stanby button light
 doesn't come up when pushed.
Message-ID: <24824141.128.1350090008735.JavaMail.coral@shine>

It seems in "standby" now, but cannot see any light on in the button.  


From mdickey at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-10-12 18:00:08: The stanby button
 light doesn't come up when pushed.
Message-ID: <25455840.8.1350309747610.JavaMail.coral@shine>

Bulb replaced


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-10-21 08:11:38: He Shutoff Valve
Message-ID: <16781548.4.1350832299100.JavaMail.coral@shine>

Please DO Not close the He valve on the wall behind the
tool..


From kcbalram at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-10-25 15:12:33: Process 3 not working
Message-ID: <15787122.105.1351203153610.JavaMail.coral@shine>

Not able to strike plasma on process 3 on CHF3/O2 recipe
Process 2 working OK
Best,
Krishna


From eenriquez at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-10-25 15:12:33: Process 3 not working
Message-ID: <19984618.114.1351268102681.JavaMail.coral@shine>

The matching network was way out of tune.  Adjusted the matching network and ran the user's recipe with no problems.


From mdickey at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-11-13 08:30:46: CF4
Message-ID: <27376704.1.1352824246316.JavaMail.coral@shine>

Temporarily out of CF4. Replacement is being ordered


From mdickey at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-11-13 08:30:46: CF4
Message-ID: <670174.6.1352824556377.JavaMail.coral@shine>

not used on this tool


From piggotta at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: piggotta at snf.stanford.edu (piggotta at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-11-23 23:06:29: Water flow for RF appears
 to be off
Message-ID: <32459020.19.1353740789955.JavaMail.coral@shine>

The flow meter for the RF cooling water appears to read very low / off.


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-11-23 23:06:29: Water flow for RF
 appears to be off
Message-ID: <25902690.0.1353860945282.JavaMail.coral@shine>

Flushed cathode cooling line, RF cooling is back up to 10gph.


From piggotta at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: piggotta at snf.stanford.edu (piggotta at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-12-10 16:21:10: RF cooling water flow
 meter
Message-ID: <26256004.19.1355185271052.JavaMail.coral@shine>

The RF cooling water flow meter appears to be reading zero flow.


From piggotta at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: piggotta at snf.stanford.edu (piggotta at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Comment drytek4 SNF 2012-12-10 17:26:18: RF cooling water OK
Message-ID: <17950701.30.1355189178803.JavaMail.coral@shine>

Never mind, I was misreading the water flow meter (please ignore my previous problem report)


From cbaxter at snf.stanford.edu  Fri Jan 11 13:05:22 2013
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:05:22 -0000
Subject: Problem drytek4 SNF 2012-12-10 16:21:10: RF cooling water flow
 meter
Message-ID: <28073099.31.1355196094905.JavaMail.coral@shine>

Cooling are ok...