January 2013 Archives by date

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Starting: Fri Jan 11 13:05:22 PST 2013
Ending: Fri Jan 11 13:05:22 PST 2013
Messages: 47

Problem drytek4 SNF 2012-09-27 15:47:57: RF on LED not working mdickey at snf.stanford.edu
Problem drytek4 SNF 2012-09-27 15:47:57: RF on LED not working kcbalram at snf.stanford.edu
Comment drytek4 SNF 2012-07-29 20:09:59: Update cbaxter at snf.stanford.edu
Problem drytek4 SNF 2012-09-29 23:53:41: pressure is not stable. fluctuated cbaxter at snf.stanford.edu
Comment drytek4 SNF 2012-08-12 19:57:45: Ok to use cbaxter at snf.stanford.edu
Problem drytek4 SNF 2012-10-25 15:12:33: Process 3 not working kcbalram at snf.stanford.edu
Comment drytek4 SNF 2012-10-21 08:11:38: He Shutoff Valve cbaxter at snf.stanford.edu
Comment drytek4 SNF 2012-12-10 17:26:18: RF cooling water OK piggotta at snf.stanford.edu
Comment drytek4 SNF 2012-02-09 11:51:05: Test Qual was GOOD jperez at snf.stanford.edu
Problem drytek4 SNF 2012-10-25 15:12:33: Process 3 not working eenriquez at snf.stanford.edu
Problem drytek4 SNF 2012-09-19 09:18:45: Problems during etch cbaxter at snf.stanford.edu
Problem drytek4 SNF 2012-09-29 23:53:41: pressure is not stable. fluctuated clee58 at snf.stanford.edu
Shutdown drytek4 SNF 2012-08-17 16:24:49: no process cooling water cbaxter at snf.stanford.edu
Comment drytek4 SNF 2012-10-05 13:40:17: RF works janp at snf.stanford.edu
Shutdown drytek4 SNF 2012-08-17 16:24:49: no process cooling water eenriquez at snf.stanford.edu
Comment drytek4 SNF 2012-07-19 08:13:24: Update jperez at snf.stanford.edu
Comment drytek4 SNF 2012-08-12 19:57:45: Ok to use jperez at snf.stanford.edu
Comment drytek4 SNF 2012-07-24 08:46:42: Update Process 1 cbaxter at snf.stanford.edu
Comment drytek4 SNF 2012-08-30 10:56:04: Cleaned the upper electrode jperez at snf.stanford.edu
Problem drytek4 SNF 2012-10-12 18:00:08: The stanby button light doesn't come up when pushed. clee58 at snf.stanford.edu
Problem drytek4 SNF 2012-10-05 13:33:13: No RF power eenriquez at snf.stanford.edu
Problem drytek4 SNF 2012-10-12 18:00:08: The stanby button light doesn't come up when pushed. mdickey at snf.stanford.edu
Comment drytek4 SNF 2012-03-28 10:35:24: Completed monthly pm jperez at snf.stanford.edu
Problem drytek4 SNF 2012-11-23 23:06:29: Water flow for RF appears to be off cbaxter at snf.stanford.edu
Problem drytek4 SNF 2012-07-23 18:17:55: On "process1",no O2 flow cbaxter at snf.stanford.edu
Problem drytek4 SNF 2012-12-10 16:21:10: RF cooling water flow meter piggotta at snf.stanford.edu
Problem drytek4 SNF 2012-08-12 10:27:15: will not pump down maxms at snf.stanford.edu
Problem drytek4 SNF 2012-11-13 08:30:46: CF4 mdickey at snf.stanford.edu
Problem drytek4 SNF 2012-12-10 16:21:10: RF cooling water flow meter cbaxter at snf.stanford.edu
Comment drytek4 SNF 2011-12-11 12:49:27: Purging jperez at snf.stanford.edu
Comment drytek4 SNF 2012-08-30 10:56:04: Cleaned the upper electrode eenriquez at snf.stanford.edu
Problem drytek4 SNF 2012-11-23 23:06:29: Water flow for RF appears to be off piggotta at snf.stanford.edu
Problem drytek4 SNF 2012-09-19 09:18:45: Problems during etch kcbalram at snf.stanford.edu
Comment drytek4 SNF 2012-10-05 13:40:17: RF works eenriquez at snf.stanford.edu
Problem drytek4 SNF 2012-11-13 08:30:46: CF4 mdickey at snf.stanford.edu
Problem drytek4 SNF 2012-10-05 13:33:13: No RF power janp at snf.stanford.edu
Problem drytek4 SNF 2012-08-12 10:27:15: will not pump down cbaxter at snf.stanford.edu
Comment drytek4 SNF 2012-07-02 09:52:23: Pumping out the C4F8 jperez at snf.stanford.edu
Problem drytek4: rpu at snf.stanford.edu
Problem Clear drytek4: replaced bulb booth at snf.stanford.edu
Shutdown drytek4: Comp Air leak. Comp Air is shut off mcvittie at snf.stanford.edu
Shutdown Clear drytek4: air is back on... cbaxter at snf.stanford.edu
Problem drytek4: after hitting the standby button, drytek 4 keeps hissing lin at snf.stanford.edu
Shutdown drytek4: can not load wafers, solenoid keep hissing lin at snf.stanford.edu
No subject
Shutdown Clear drytek4: changed leaking by solenoid cbaxter at snf.stanford.edu
Problem Clear drytek4: changed leaking by solenoid cbaxter at snf.stanford.edu

Last message date: Fri Jan 11 13:05:22 PST 2013
Archived on: Fri Jan 11 13:05:32 PST 2013

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