From booth at snf.stanford.edu  Thu May  2 11:42:44 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 02 May 2002 11:42:44 -0700
Subject: Drytek4 ststus  05/2/02
Message-ID: <3CD188A4.20353AE5@snf.stanford.edu>

Users -
	Part of the upper electrode assembly
is badly corroded, and it may take several
weeks to acquire or make a replacement part.
Some of you may be able to use Drytek1 as
an alternative until Drytek4 is up again.
Contact Henry or Nancy for details.
			Len


From booth at snf.stanford.edu  Fri May 31 13:13:59 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 31 May 2002 13:13:59 -0700
Subject: Drytek4 is ready for use
Message-ID: <3CF7D987.8C4A0A59@snf.stanford.edu>

Drytek4 users -
	The shutdown has been removed, and the
machine is ready for use.  Some of the repairs include:

repaired & aligned endpoint monitor.  Cleaned sapphire window in upper
electrode

repaired vacuum leaks & upper & lower electrode water leaks

replaced leaky ?" manometer isolation valve

replaced leaky wafer lift diaphragm.	

Installed new Chamber O-rings

changed vane pump oil & drained demister, changed oil filters

after pumping down chamber for 1 hour in Standby @ ~200 mT
        leak-rate is less than  1 mT/min

after pumping chamber overnight in Standby @ ~200 mTorr, 
	leak-rate=  0.25 mT/min

If you have any comments or suggestions on how the machine
is running, please send me e-mail.
			Len