From booth at snf.stanford.edu  Tue Apr  1 08:39:19 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 01 Apr 2003 08:39:19 -0800
Subject: Freon-115  (C2ClF5)
Message-ID: <3E89C0B7.343FBDAA@snf.stanford.edu>

	Our last supply of Freon-115 is getting low
and will probably be empty in the next few weeks.
When this happens, we plan to install Freon-22 as
the replacement etch gas for the Dryteks & the MRC.

Jim McVittie has done testing of the etch characteristics
of Freon-115 last year, and can provide info on the
process issues that you may experience.

	I will send an e-mail announcement when the
gas supply is changed from  F-115  to  F-22.

			Len