Freon-115 (C2ClF5)

Len Booth booth at snf.stanford.edu
Tue Apr 1 08:39:19 PST 2003


	Our last supply of Freon-115 is getting low
and will probably be empty in the next few weeks.
When this happens, we plan to install Freon-22 as
the replacement etch gas for the Dryteks & the MRC.

Jim McVittie has done testing of the etch characteristics
of Freon-115 last year, and can provide info on the
process issues that you may experience.

	I will send an e-mail announcement when the
gas supply is changed from  F-115  to  F-22.

			Len



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