From mcvittie at snf.stanford.edu Wed Jun 9 22:19:31 2004 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Wed, 09 Jun 2004 22:19:31 -0700 Subject: Problem drytek4 2004-06-09 14:45:54: pedestal Message-ID: <40C7EF63.8F7A8729@snf.stanford.edu> Randy, Some years ago I looked at pedestal issue on Drytek4. In particular, I looked at disabling it. It is easy to disable it however there is a problem. If you disable it, you trap air in it. I found when the trapped air comes out under the wafer during pump down, it tends to move the wafer off the center of the electrode, which is not desirable. If one loads a wafer on the pedestal when it is up, the wafer should stay in the center of the electrode. The same should be true for pieces. Perhaps the electrode is not level or the slow pumping is not working. If you still have problems, I suggest you mount your pieces on a carrier wafer. Jim -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: