From ankurjn at stanford.edu  Fri Oct 21 14:29:51 2005
From: ankurjn at stanford.edu (Ankur Jain)
Date: Fri, 21 Oct 2005 14:29:51 -0700
Subject: Silicon Nitride etch?
Message-ID: <1129930191.43595dcf6d984@webmail.stanford.edu>

Hello drytek4 users,
 I was wondering if any one of you has a recipe for etching silicon nitride
in drytek4. The film I want to etch is about 2 um thick and was deposited
on Silicon in the LPCVD nitride furnace in SNF.
 I looked through the logbook, but it seems like no one has used drytek4 for
nitride etch in the recent past. Please let me know if you might know a
recipe.


thanks,

Ankur