Changes at Drytek4

jim kruger jimkruger at yahoo.com
Tue Apr 4 18:54:54 PDT 2006


With the leaks plugged, Drytek4 seems back to normal
except that the pressure zero has been corrected.

It had been set to -40 mTorr in recent times, it is
now set to +10 mTorr, a more realistic number.

ACTION:  If you want your recipe to be the same as
before, add 50 mTorr to the pressure setting.  If you
had run 150 mTorr, set it to 200, if it had been 100
mTorr, set it to 150.

If you have questions, try to catch me in the lab, or
at desk 50 in the open area outside CIS 143-147.  Or
e-mail.

jimkruger

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