SiO2 etching with PMMA mask

Jun Pan panjun at
Fri Feb 24 13:42:49 PST 2006

Dear all,

I need to etch 50nm SiO2 with a PMMA mask of 200nm.  The feature size is
about 200nm.  Does anyone have such experience?  

What is recipe in Drytek4, or any other better equipment I can use?
What is etching rate of SiO2 and PMMA?

Any suggestions are greatly appreciated.

Best regards,

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