From cm_richter at att.net  Thu Aug  9 13:45:19 2007
From: cm_richter at att.net (Claudia Richter)
Date: Thu, 09 Aug 2007 20:45:19 +0000
Subject: Drytek4: Cancelled Reservation Friday 10:30am - 1:30pm
Message-ID: <080920072045.28799.46BB7CDE000A24F90000707F21603760219D0A9B080C079DA1030C@att.net>

My substrates will not be ready on time to use this time slot.


Claudia


From huangzb at stanford.edu  Thu Aug  9 15:06:00 2007
From: huangzb at stanford.edu (Zubin Huang)
Date: Thu, 9 Aug 2007 15:06:00 -0700
Subject: SiO2/Si3N4 etch on drytek4
Message-ID: <062b01c7dad1$7851df40$d97640ab@RPLZubin>

Hi,

Can anyone help us do some SiO2 Si3N4 etch on drytek4? We have 
1000A/1000A/1000A Oxide Nitride Oxide Layer on ITO wafers and we are meeting 
a deadline next week. The MRC we used previously is down for a while.

Thanks,
Zubin 
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