From chen0622 at yahoo.com  Tue Dec  4 20:47:04 2007
From: chen0622 at yahoo.com (c.c.)
Date: Tue, 4 Dec 2007 20:47:04 -0800 (PST)
Subject: the alignment mark etching on Pyrex glass wafer
Message-ID: <743793.77881.qm@web56802.mail.re3.yahoo.com>

Hi guys,

   I need to etch the ASML alignment marks on the Pyrex glass wafer.  Since the Pyrex glass wafer is considered as gold contaminated, therefore I only have the options on either drytek1 or drytek4.  The alignment mark needs about 2300 A deep.   If you could share your experience or ideas about the recipe and etch rate to me, that would be a big help for me.  


Thanks in advance and have a nice evening!

Chih-Chang Chen
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