From cwan at stanford.edu  Thu Jun 12 13:28:45 2008
From: cwan at stanford.edu (cwan at stanford.edu)
Date: Thu, 12 Jun 2008 13:28:45 -0700
Subject: Etch back receipe
Message-ID: <20080612132845.7qzvfvpm4gw844s0@webmail.stanford.edu>

Dear labmembers,

Does anyone know an etch back receipe? I would like to spin  
photoresist on sio2 and do an etch back hoping to planarize the surface.

Thanks a lot,
Gordon

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PhD Candidate
Electrical Engineering
Stanford University