gold sputtering

Sonny Vo sonnyvo at
Mon Nov 2 18:38:15 PST 2009

hi all,
have any of you sputtered off gold using Ar in the drytek4? i was told mrc
does a good job. either way, if you can give me rough info as to the
rate/pressure/power  i can get a rough idea to calibrate i'd
appreciate it. thanks a bunch!

Best Regards,
Sonny Vo
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