From jaypark at stanford.edu Wed Aug 4 15:43:07 2010 From: jaypark at stanford.edu (Jason Matthew Parker) Date: Wed, 4 Aug 2010 15:43:07 -0700 (PDT) Subject: 4pm reservation today released In-Reply-To: <1049677912-1280961605-cardhu_decombobulator_blackberry.rim.net-863713089-@bda887.bisx.prod.on.blackberry> Message-ID: <1545267514.1375784.1280961787558.JavaMail.root@zm08.stanford.edu> Hi drytek4 users, I have a 4pm reservation today that I cannot use (wafers not done). So, please feel free to plan on using the time (time just released). Sorry for the late notice. Jason From ahazeghi at stanford.edu Mon Aug 9 21:31:20 2010 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 9 Aug 2010 21:31:20 -0700 (PDT) Subject: Problem with Drytek 4 Message-ID: <161129593.35884.1281414680062.JavaMail.root@zm03.stanford.edu> Hi, I tried to run a wafer in drytek 4this evening, there is a problem with the power supply or chuck bias, power is very unstable and plasma flickers. cannot adjust reflected power at any setting because of instability, tried for ~ 45min then gave up. Please look into this . Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: