silicon etch recipes

Alex Neuhausen alexneu at stanford.edu
Tue Apr 26 17:25:13 PDT 2011


Hello Drytek4 users,
Could anyone please recommend a silicon etching recipe?
Best,
Alex

--
Alex Neuhausen
PhD Candidate Electrical Engineering
Goldhaber-Gordon Lab
476 Lomita Mall
Stanford, CA 94305
Office: 650-725-2047
Cell: 650-776-5672
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