From mtang at stanford.edu  Tue Jun 26 14:05:39 2012
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 26 Jun 2012 14:05:39 -0700
Subject: No Freon 318
Message-ID: <4FEA2423.8040805@stanford.edu>

Dear stsetch/2/drytek4 users --

The replacement cylinder of C4F8 is due Wednesday, Thursday at the 
latest.  We apologize for the inconvenience and are working to address 
the problems.

Team Etch

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From nlatta at stanford.edu  Wed Jun 27 16:35:23 2012
From: nlatta at stanford.edu (Nancy Latta)
Date: Wed, 27 Jun 2012 16:35:23 -0700
Subject: C4F8 back online
Message-ID: <4FEB98BB.30804@stanford.edu>

Happy etching!