Drytek Usage: Input Requested

Dragoslav Grbovic dgrbovic at snf.stanford.edu
Tue Sep 18 15:04:40 PDT 2012

On Tue, Sep 18, 2012 at 12:57 PM, Scott Lee <wslee at stanford.edu> wrote:

> Hello Drytek Users,
> SNF is in the process of looking at buying new tools to eventually replace
> the vintage Drytek etchers in SNF. We want to ensure that the current
> processes can be supported on the new tools. Respond to Scott at
> wslee at stanford.edu with your Drytek processing requirements. We would
> like to know:
> (1) what material do you etch in Drytek?
silicon oxide, silicon nitride

(2) what is your masking material?

> (3) what are your cleanliness requirements?

(3) what process gases do you need?
> (4) what typical etch power do you use?
> (5) any other features you would like to see on the tool?
> Please respond within a week by 9/25. We are looking at purchasing the
> tool in the next couple weeks.
> Thanks,
> SNF User Adcom
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