From sanda at snf.stanford.edu Tue Jun 13 01:16:26 2006 From: sanda at snf.stanford.edu (sanda at snf.stanford.edu) Date: Tue, 13 Jun 2006 01:16:26 -0700 Subject: Problem ellipsomter SNF 2006-06-13 01:16:25: value is not correct Message-ID: 1000A ref -----1200A also Where is manual? From uli at snf.stanford.edu Tue Jun 13 15:22:10 2006 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 13 Jun 2006 15:22:10 -0700 Subject: Comment ellipsomter SNF 2006-05-01 16:34:06: oxide wafer is gone Message-ID: From vilanova at snf.stanford.edu Wed Jun 14 06:36:53 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Jun 2006 06:36:53 -0700 Subject: Problem ellipsomter SNF 2006-06-13 01:16:25: value is not correct Message-ID: This One should be Under a Comment not a Problem. From uli at snf.stanford.edu Wed Jun 14 09:26:32 2006 From: uli at snf.stanford.edu (Uli Thumser) Date: Wed, 14 Jun 2006 09:26:32 -0700 Subject: Problem ellipsomter SNF 2006-06-13 01:16:25: value is not correct Message-ID: <449038B8.7060305@snf.stanford.edu> Sooy for the late response. I've reset the system and measured the test wafer yesterday. Everything is fine. Uli vilanova at snf.stanford.edu wrote: >This One should be Under a Comment not a Problem. > > -- Uli Thumser Stanford Nanofabrication Facility Center for Integrated Systems 420 Via Palou Mall, CIS Room 146 Stanford, CA 94305 (650)725-3694 uli at snf.stanford.edu