From mcvittie at snf.stanford.edu Tue Oct 9 12:17:22 2007 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 9 Oct 2007 12:17:22 -0700 Subject: Shutdown ellipsomter SNF 2007-09-28 17:50:11: No Laser Light on Ellipsometer Message-ID: The tool seems to be working ok. Got 1016A on 1014 ref waferMeasurement should get better as laser warms up. Next week, I will do some final adjustments. Jim From mcvittie at snf.stanford.edu Tue Oct 9 12:17:45 2007 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 9 Oct 2007 12:17:45 -0700 Subject: Problem ellipsomter SNF 2007-09-18 19:25:38: Random errors Message-ID: Replaced laser. Jim From mcvittie at snf.stanford.edu Tue Oct 9 12:18:02 2007 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 9 Oct 2007 12:18:02 -0700 Subject: Problem ellipsomter SNF 2007-09-25 18:56:49: Laser beam problem Message-ID: Replaced laser. Jim From mcvittie at snf.stanford.edu Tue Oct 9 12:18:17 2007 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 9 Oct 2007 12:18:17 -0700 Subject: Problem ellipsomter SNF 2007-09-21 22:29:43: Errors Message-ID: Replaced Laser. Jim From skoh at snf.stanford.edu Mon Oct 15 12:53:22 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Mon, 15 Oct 2007 12:53:22 -0700 Subject: Problem ellipsomter SNF 2007-10-15 12:53:21: Out of paper Message-ID: From rissman at snf.stanford.edu Tue Oct 16 09:25:12 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 16 Oct 2007 09:25:12 -0700 Subject: Problem ellipsomter SNF 2007-10-15 12:53:21: Out of paper Message-ID: Mario replaced paper.