Shutdown ellipsomter SNF 2007-09-28 17:50:11: No Laser Light on Ellipsometer

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Tue Oct 9 12:17:22 PDT 2007

Next message: Problem ellipsomter SNF 2007-09-18 19:25:38: Random errors
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

The tool seems to be working ok. Got 1016A on 1014 ref waferMeasurement should get better as laser warms up. Next week, I will do some final adjustments.     Jim

Next message: Problem ellipsomter SNF 2007-09-18 19:25:38: Random errors
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the ellipsomter-pcs mailing list