Shutdown ellipsomter SNF 2007-09-28 17:50:11: No Laser Light on Ellipsometer

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Tue Oct 9 12:17:22 PDT 2007


The tool seems to be working ok. Got 1016A on 1014 ref waferMeasurement should get better as laser warms up. Next week, I will do some final adjustments.     Jim




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