From gunjim at snf.stanford.edu  Mon Sep 10 13:28:49 2007
From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu)
Date: Mon, 10 Sep 2007 13:28:49 -0700
Subject: Problem ellipsomter SNF 2007-09-10 13:28:49: printer paper out
Message-ID: <mailman.88.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Please replace. Thank you.



From vilanova at snf.stanford.edu  Mon Sep 10 14:08:35 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 10 Sep 2007 14:08:35 -0700
Subject: Problem ellipsomter SNF 2007-09-10 13:28:49: printer paper out
Message-ID: <mailman.89.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

replaced paper. 



From king at snf.stanford.edu  Tue Sep 18 19:25:38 2007
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Tue, 18 Sep 2007 19:25:38 -0700
Subject: Problem ellipsomter SNF 2007-09-18 19:25:38: Random errors
Message-ID: <mailman.90.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Getting machine errors up to 3 times out of 5 readings.  Just leaving the wafer in place and retrying it again usually works, meaning it's the machine and not the wafers.  Thanks.



From gunjim at snf.stanford.edu  Fri Sep 21 22:29:43 2007
From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu)
Date: Fri, 21 Sep 2007 22:29:43 -0700
Subject: Problem ellipsomter SNF 2007-09-21 22:29:43: Errors
Message-ID: <mailman.91.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

I am also having error message saying "OPPROG ERROR" this past 1 month. In addition, thickness deviates a lot from the expected value. Some times thicker and some times thinner. Please look up this problem. 



From khanh at snf.stanford.edu  Tue Sep 25 18:56:50 2007
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: Tue, 25 Sep 2007 18:56:50 -0700
Subject: Problem ellipsomter SNF 2007-09-25 18:56:49: Laser beam problem 
Message-ID: <mailman.92.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

I noticed that the beam on the chuck on and off and seem like the beam is blocked sometimes.
Measured LTO oxide on si (expected 200) and gave me 4 different values at the same spot on the wafer 150, 201, 750 and  1000.



From mcvittie at snf.stanford.edu  Fri Sep 28 17:50:11 2007
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Fri, 28 Sep 2007 17:50:11 -0700
Subject: Shutdown ellipsomter SNF 2007-09-28 17:50:11: No Laser Light on Ellipsometer
Message-ID: <mailman.93.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Next week, I will check to see if thec laser is getting poer.  Jim