From gth at snf.stanford.edu  Tue Aug 26 14:46:22 2008
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Tue, 26 Aug 2008 14:46:22 -0700
Subject: Problem ellipsomter SNF 2008-08-26 14:46:21: the printer cartridge is over and the assembly is coiled
Message-ID: <mailman.111.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>




From gth at snf.stanford.edu  Tue Aug 26 14:46:35 2008
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Tue, 26 Aug 2008 14:46:35 -0700
Subject: Problem ellipsomter SNF 2008-08-26 14:46:35: tweezer lost, please put new !
Message-ID: <mailman.112.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>




From masaharu at snf.stanford.edu  Tue Aug 26 21:52:53 2008
From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu)
Date: Tue, 26 Aug 2008 21:52:53 -0700
Subject: Shutdown ellipsomter SNF 2008-08-26 21:52:51: not measure properly
Message-ID: <mailman.113.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

I measured reference SiO2, of which thickness is 3.5nm.
This thickness was confirmed by Woolam before, also.
However, this time Rudolph gave 7nm while Woolam
gave us 3.5nm.
I noticed this problem when I checked ALD Al2O3 thickness
by using Rudolph.
Please check the status of Rudolph.
There might be problem on laser alighment.



From vilanova at snf.stanford.edu  Thu Aug 28 07:23:17 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 28 Aug 2008 07:23:17 -0700
Subject: Problem ellipsomter SNF 2008-08-26 14:46:21: the printer cartridge is over and the assembly is coiled
Message-ID: <mailman.114.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Replaced paper and I also FOund the tweezers.



From vilanova at snf.stanford.edu  Thu Aug 28 07:23:25 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 28 Aug 2008 07:23:25 -0700
Subject: Problem ellipsomter SNF 2008-08-26 14:46:35: tweezer lost, please put new !
Message-ID: <mailman.115.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Replaced paper and I also FOund the tweezers.



From uli at snf.stanford.edu  Fri Aug 29 15:28:18 2008
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Fri, 29 Aug 2008 15:28:18 -0700
Subject: Shutdown ellipsomter SNF 2008-08-26 21:52:51: not measure properly
Message-ID: <mailman.116.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

adjusted stage height, test wafer oxid thickness 1022A, NU 1.47. System ready to use.