Shutdown ellipsomter SNF 2008-08-26 21:52:51: not measure properly

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Tue Aug 26 21:52:53 PDT 2008


I measured reference SiO2, of which thickness is 3.5nm.
This thickness was confirmed by Woolam before, also.
However, this time Rudolph gave 7nm while Woolam
gave us 3.5nm.
I noticed this problem when I checked ALD Al2O3 thickness
by using Rudolph.
Please check the status of Rudolph.
There might be problem on laser alighment.




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