From uli at snf.stanford.edu  Thu Apr  1 17:52:11 2010
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 1 Apr 2010 17:52:11 -0700
Subject: Comment ellipsomter SNF 2010-04-01 17:52:11: Rudolph now in room L106 (AFM room).
Message-ID: <mailman.143.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Test wafer oxide thickness is 1004A. Tool is ok to use.



From uli at snf.stanford.edu  Mon Apr 26 10:22:16 2010
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Mon, 26 Apr 2010 10:22:16 -0700
Subject: Shutdown ellipsomter SNF 2010-04-26 10:22:16: Laser is not working anymore
Message-ID: <mailman.144.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Tue Apr 27 06:11:40 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 27 Apr 2010 06:11:40 -0700
Subject: Comment ellipsomter SNF 2010-04-27 06:11:40: New Laser ordered
Message-ID: <mailman.145.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Apr 30 10:19:08 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 30 Apr 2010 10:19:08 -0700
Subject: Shutdown ellipsomter SNF 2010-04-26 10:22:16: Laser is not working anymore
Message-ID: <mailman.146.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Replaced laser and ran test wafer several times it looks good



From tberg at snf.stanford.edu  Fri Apr 30 10:19:16 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 30 Apr 2010 10:19:16 -0700
Subject: Comment ellipsomter SNF 2010-04-27 06:11:40: New Laser ordered
Message-ID: <mailman.147.1356281496.3670.ellipsomter-pcs@snf.stanford.edu>

Replaced laser and ran test wafer several times it looks good