Question about measuring thickness...

Sarah Bryan sarahb4671 at gmail.com
Tue Jun 20 15:20:08 PDT 2006


I'm in the SNF REU program and was just trained on the Ellipsometer. I tried
to measure a couple of silicon samples with nitride today and got decent
values, but when I tried to determine the thickness of a thin film of
oxycarbosilane glass on a silicon wafer, I got back the message "Calculation
Error 71". Does anyone know what this means or why I wouldn't be able to
measure this particular film? Thanks in advance for your help...

Sarah Bryan
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