From kimsangb at stanford.edu  Tue Nov 14 00:18:11 2006
From: kimsangb at stanford.edu (SangBum Kim)
Date: Tue, 14 Nov 2006 00:18:11 -0800
Subject: Last night WET1100A oxidation in tylan2
Message-ID: <000601c707c5$6c82ed60$a9b50c80@sangbumhome>

Dear tylan2 users,

 

 I did oxidation with WET1100A for more than 2 hours (with 10 minutes
annealing) expecting 10000A thick oxide. It came out blue color and when I
measured the thickness with nanospec (both of them) and ellipsometer, they
gave me quite strange numbers.

 

 Nanospec gave me ~1350A / 1.466 and ellipsometer gave me 9466A/2.996
(routine 10) or 2465A (routine 11 with n=1.468). Is this too thick for
these measurements?

 

 Could anyone give me a clue for these? Has anyone seen open tylan2 tube
before 10:00 PM (I was expecting it to be open around 10:30 PM)?

 

Thanks,

SangBum

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/ellipsomter/attachments/20061114/c40d1f16/attachment.html>