From maurice at snf.stanford.edu  Wed Dec 13 16:54:47 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 13 Dec 2006 16:54:47 -0800
Subject: Comment epi2 SNF 2006-12-13 16:54:46: N doped ok/P doped?/SiGe ??
Message-ID: <mailman.2.1356281541.3688.epi2-pcs@snf.stanford.edu>

The N doped tests looked good.
The 1% boron had an SRP thickness double of what we expected.  Solecon has been asked to recheck the bevel angle and the thickness. Doping level was good
The 100ppm boron SRP doping level look strange.  Yonah believes it is because the doping level is low.  We will repeat this later.  Thickness was good.
The Low SiGe layers grown on prime material showed no Ge peaks using XRD.  Only the dummy wafer looked good.  We need to repeat the test.