From tberg at snf.stanford.edu Thu Apr 12 06:15:30 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2007 06:15:30 -0700 Subject: Comment epi2 SNF 2007-03-13 15:36:33: Broken Blade Message-ID: Blade replaced From tberg at snf.stanford.edu Thu Apr 12 06:15:45 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2007 06:15:45 -0700 Subject: Problem epi2 SNF 2007-03-09 11:42:39: Wafer not on blade Message-ID: Blade replaced From tberg at snf.stanford.edu Thu Apr 12 06:16:10 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2007 06:16:10 -0700 Subject: Comment epi2 SNF 2007-03-09 14:49:41: Amat coming 3/10/07 Message-ID: Blade replaced and retaught From tberg at snf.stanford.edu Thu Apr 12 06:16:48 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2007 06:16:48 -0700 Subject: Comment epi2 SNF 2007-03-29 10:57:15: update: Susceptor ring ordered Message-ID: Suceptor ring replaced From tberg at snf.stanford.edu Thu Apr 12 06:17:29 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2007 06:17:29 -0700 Subject: Comment epi2 SNF 2007-04-12 06:17:28: Upper dome broken Message-ID: Upper dome broken during install. New one is ordered From maurice at snf.stanford.edu Tue Apr 17 14:37:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Apr 2007 14:37:05 -0700 Subject: Comment epi2 SNF 2007-04-17 14:37:04: AMAT here/replacing dome Message-ID: From tberg at snf.stanford.edu Tue Apr 17 14:57:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Apr 2007 14:57:44 -0700 Subject: Comment epi2 SNF 2007-04-17 14:57:43: Dome replaced Message-ID: Handling checked Leak check From tberg at snf.stanford.edu Tue Apr 17 14:58:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Apr 2007 14:58:00 -0700 Subject: Comment epi2 SNF 2007-04-12 06:17:28: Upper dome broken Message-ID: Replaced From tberg at snf.stanford.edu Tue Apr 17 14:58:21 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Apr 2007 14:58:21 -0700 Subject: Comment epi2 SNF 2007-03-28 11:10:42: Amat working on Blade Message-ID: Blade replaced and taught From maurice at snf.stanford.edu Tue Apr 17 15:09:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Apr 2007 15:09:35 -0700 Subject: Comment epi2 SNF 2007-04-17 15:09:34: dome replaced/system baking out Message-ID: From maurice at snf.stanford.edu Tue Apr 17 17:28:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Apr 2007 17:28:28 -0700 Subject: Shutdown epi2 SNF 2007-03-08 12:00:36: not mapping wafers correctly Message-ID: Robot arms straighted. Blade replaced. Susceptor ring replaced. Chamber A dome replaced. Wafers have been cycled in and out. System baked. Three Etch and Coats were run. SiGe750-1 recipe was run. No Haze. 5um-Pdope recipe was run. Dep rate ~4um...as expected. System up. From rik at snf.stanford.edu Thu Apr 19 02:06:34 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 19 Apr 2007 02:06:34 -0700 Subject: Problem epi2 SNF 2007-04-19 02:06:33: Pressure set point deviation errors Message-ID: The set point of 10 torr is not reached (hovers around 11.5torr) for the H2 anneal recipe. On the third warning, the machine takes chamber A offline. Tried this 3 times and same result every time. From tberg at snf.stanford.edu Thu Apr 19 14:36:26 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Apr 2007 14:36:26 -0700 Subject: Comment epi2 SNF 2007-04-17 14:57:43: Dome replaced Message-ID: noted From tberg at snf.stanford.edu Thu Apr 19 14:36:43 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Apr 2007 14:36:43 -0700 Subject: Comment epi2 SNF 2007-04-17 15:09:34: dome replaced/system baking out Message-ID: completed From tberg at snf.stanford.edu Thu Apr 19 14:36:54 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Apr 2007 14:36:54 -0700 Subject: Comment epi2 SNF 2007-04-17 14:37:04: AMAT here/replacing dome Message-ID: noted From maurice at snf.stanford.edu Fri Apr 20 11:14:34 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 Apr 2007 11:14:34 -0700 Subject: Comment epi2 SNF 2007-02-13 15:34:52: Ge deposition started Message-ID: logged From rshyam at snf.stanford.edu Sat Apr 21 22:01:48 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 21 Apr 2007 22:01:48 -0700 Subject: Problem epi2 SNF 2007-04-21 22:01:47: wafer stuck inside Message-ID: wafer is stuck inside transfer chamber. From maurice at snf.stanford.edu Sun Apr 22 13:00:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 22 Apr 2007 13:00:43 -0700 Subject: Problem epi2 SNF 2007-04-21 22:01:47: wafer stuck inside Message-ID: User stopped automatic process. This left loadloack and cool chamber at different pressures. "Purged in" (on loadlock menu) to pump down loadlock. Wafer was then moved to loadlock. From maurice at snf.stanford.edu Sun Apr 22 13:01:19 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 22 Apr 2007 13:01:19 -0700 Subject: Comment epi2 SNF 2007-02-13 15:40:10: H2 anneal optimization Message-ID: logged From rik at snf.stanford.edu Mon Apr 23 22:50:16 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 23 Apr 2007 22:50:16 -0700 Subject: Comment epi2 SNF 2007-04-23 22:50:16: 2 wafers in LL B Message-ID: Someone left 2 wafers in LL B. Unsure of where to unload them. From maurice at snf.stanford.edu Tue Apr 24 09:08:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Apr 2007 09:08:35 -0700 Subject: Problem epi2 SNF 2007-04-19 02:06:33: Pressure set point deviation errors Message-ID: Asked user to reduce H2 flows in his recipe From maurice at snf.stanford.edu Wed Apr 25 11:48:40 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Apr 2007 11:48:40 -0700 Subject: Shutdown epi2 SNF 2007-04-25 11:48:39: Dopant fault/Aborted run Message-ID: Wafer in ChamberA. Chamber isolated. Chamber A won't come online. -m From eenriquez at snf.stanford.edu Fri Apr 27 13:24:01 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2007 13:24:01 -0700 Subject: Shutdown epi2 SNF 2007-04-25 11:48:39: Dopant fault/Aborted run Message-ID: Homed the PCV valve and place the chamber in cold Idle mode. Unloaded the user's wafer but left it in loadlock A. Chamber is now online. Still need run process to verify operation. From eenriquez at snf.stanford.edu Fri Apr 27 13:25:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2007 13:25:55 -0700 Subject: Problem epi2 SNF 2007-04-27 13:25:55: Needs to be tested. Message-ID: From nevran at snf.stanford.edu Fri Apr 27 19:13:55 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Fri, 27 Apr 2007 19:13:55 -0700 Subject: Shutdown epi2 SNF 2007-04-27 19:13:54: Pressure Setpoint Deviation Fault Message-ID: Ran a test wafer after previous shutdown. Gave the above error and isolated chamber A. Was able to bring chamber back online. Started running another test wafer. Gave the same error at an earlier step, and again isolated chamber. Also, realized that the pressure was fluctuating between 13 and 19, while the setpoint was 15, during the run. From rissman at snf.stanford.edu Mon Apr 30 09:03:45 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Mon, 30 Apr 2007 09:03:45 -0700 Subject: Problem epi2 SNF 2007-04-27 13:25:55: Needs to be tested. Message-ID: try again From eenriquez at snf.stanford.edu Mon Apr 30 14:05:14 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Apr 2007 14:05:14 -0700 Subject: Shutdown epi2 SNF 2007-04-27 19:13:54: Pressure Setpoint Deviation Fault Message-ID: Problem with only the SIMS recipe. It aborts during the stabilation step in between the deposition steps. It looks like the pump is unable to handle the large gas load along with the pressure changes. We lowered the H2 gas flow from 15 lpm to 5 lpm and increased the stabilization step time from 5 sec to 30 sec. From eenriquez at snf.stanford.edu Mon Apr 30 14:09:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Apr 2007 14:09:26 -0700 Subject: Problem epi2 SNF 2007-04-30 14:09:26: User is testing the system Message-ID: User is aware of the changes to the recipe. We will check with Maurice tomorrow to verify that the changes are OK.