Problem epi2 SNF 2007-04-19 02:06:33: Pressure set point deviation errors

rik at snf.stanford.edu rik at snf.stanford.edu
Thu Apr 19 02:06:34 PDT 2007


The set point of 10 torr is not reached (hovers around 11.5torr) for the H2 anneal recipe. On the third warning, the machine takes chamber A offline. Tried this 3 times and same result every time. 




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