Problem epi2 SNF 2007-04-21 22:01:47: wafer stuck inside
rshyam at snf.stanford.edu
rshyam at snf.stanford.edu
Sat Apr 21 22:01:48 PDT 2007
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Comment epi2 SNF 2007-02-13 15:34:52: Ge deposition started
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Problem epi2 SNF 2007-04-21 22:01:47: wafer stuck inside
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wafer is stuck inside transfer chamber.
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Comment epi2 SNF 2007-02-13 15:34:52: Ge deposition started
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Problem epi2 SNF 2007-04-21 22:01:47: wafer stuck inside
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