Problem epi2 SNF 2007-04-21 22:01:47: wafer stuck inside

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Apr 22 13:00:43 PDT 2007


User stopped automatic process.  This left loadloack and cool chamber at different pressures.
"Purged in" (on loadlock menu) to pump down loadlock.
Wafer was then moved to loadlock.




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