Comment epi2 SNF 2007-04-23 22:50:16: 2 wafers in LL B
rik at snf.stanford.edu
rik at snf.stanford.edu
Mon Apr 23 22:50:16 PDT 2007
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Comment epi2 SNF 2007-02-13 15:40:10: H2 anneal optimization
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Someone left 2 wafers in LL B. Unsure of where to unload them.
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Comment epi2 SNF 2007-02-13 15:40:10: H2 anneal optimization
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Shutdown epi2 SNF 2007-04-25 11:48:39: Dopant fault/Aborted run
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