Shutdown epi2 SNF 2007-04-25 11:48:39: Dopant fault/Aborted run

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 27 13:24:01 PDT 2007


Homed the PCV valve and place the chamber in cold Idle mode.  Unloaded the user's wafer but left it in loadlock A.  Chamber is now online.  Still need run process to verify operation.




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