Shutdown epi2 SNF 2007-04-27 19:13:54: Pressure Setpoint Deviation Fault

nevran at snf.stanford.edu nevran at snf.stanford.edu
Fri Apr 27 19:13:55 PDT 2007


Ran a test wafer after previous shutdown. Gave the above error and isolated chamber A. Was able to bring chamber back online. Started running another test wafer. Gave the same error at an earlier step, and again isolated chamber. Also, realized that the pressure was fluctuating between 13 and 19, while the setpoint was 15, during the run.




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