Shutdown epi2 SNF 2007-04-27 19:13:54: Pressure Setpoint Deviation Fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 30 14:05:14 PDT 2007


Problem with only the SIMS recipe.  It aborts during the stabilation step in between the deposition steps.  It looks like the pump is unable to handle the large gas load along with the pressure changes.  We lowered the H2 gas flow from 15 lpm to 5 lpm and increased the stabilization step time from 5 sec to 30 sec.




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