From nevran at snf.stanford.edu Wed Aug 1 09:50:07 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Wed, 1 Aug 2007 09:50:07 -0700 Subject: Shutdown epi2 SNF 2007-08-01 09:50:06: pump error Message-ID: From eenriquez at snf.stanford.edu Wed Aug 1 10:16:06 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:16:06 -0700 Subject: Comment epi2 SNF 2007-08-01 10:15:59: Update Message-ID: Pump won't restart. It keeps tripping the circuit breaker. Need to send out for a re-build. From cbaxter at snf.stanford.edu Wed Aug 8 13:50:26 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Aug 2007 13:50:26 -0700 Subject: Shutdown epi2 SNF 2007-08-01 09:50:06: pump error Message-ID: Installed dry pump and at local mode, tried turning on pump bbut it shut down itself and tripped the 30amp circuit breaker on main remote box, found one the three phase ac input power inside the junction (down in the basement) shorted to ground due to a bad connection causing it to arc. re-do ac wire connection with new wire nut connector. turn on w/out problem. put system chamber a on idle mode and recovered wafer inside the chamber. From cbaxter at snf.stanford.edu Wed Aug 8 13:50:36 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Aug 2007 13:50:36 -0700 Subject: Comment epi2 SNF 2007-08-01 10:15:59: Update Message-ID: From cbaxter at snf.stanford.edu Wed Aug 8 13:50:41 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Aug 2007 13:50:41 -0700 Subject: Comment epi2 SNF 2007-05-25 16:15:50: Temp diff Message-ID: From cbaxter at snf.stanford.edu Wed Aug 8 13:50:46 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Aug 2007 13:50:46 -0700 Subject: Comment epi2 SNF 2007-05-17 10:20:39: Dome/Etch info Message-ID: From ehe at snf.stanford.edu Thu Aug 9 18:20:44 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 9 Aug 2007 18:20:44 -0700 Subject: Problem epi2 SNF 2007-08-09 18:20:43: LLA door Message-ID: Ran one wafer with success... on second wafer the LLA door would not shut. I tried many combinations of commands to try to clear the current state and close door... giving up now. From jrjain at snf.stanford.edu Thu Aug 9 18:36:39 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 9 Aug 2007 18:36:39 -0700 Subject: Shutdown epi2 SNF 2007-08-09 18:36:39: Previous user's problem Message-ID: Closed Load Lock A door. LLA is still under atmospheric pressure and needs to be pumped down before wafer can be moved from transfer chamber to cassette. - Raja (jrjain) From cbaxter at snf.stanford.edu Fri Aug 10 08:17:38 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 10 Aug 2007 08:17:38 -0700 Subject: Shutdown epi2 SNF 2007-08-09 18:36:39: Previous user's problem Message-ID: Unload wafer from transfer load lock and then homed both a and b load lock. From cbaxter at snf.stanford.edu Fri Aug 10 08:17:57 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 10 Aug 2007 08:17:57 -0700 Subject: Problem epi2 SNF 2007-08-09 18:20:43: LLA door Message-ID: From mtang at snf.stanford.edu Fri Aug 10 09:23:00 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 10 Aug 2007 09:23:00 -0700 Subject: Comment epi2 SNF 2007-08-10 09:22:58: SiH4 Line Message-ID: Keeping this off until we can confirm that it has been properly leak checked by the installer (tags are missing.) From mdickey at snf.stanford.edu Wed Aug 15 06:41:31 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 15 Aug 2007 06:41:31 -0700 Subject: Shutdown epi2 SNF 2007-08-15 06:41:31: Bottle Message-ID: Down for HCL bottle change From eenriquez at snf.stanford.edu Wed Aug 15 09:21:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Aug 2007 09:21:35 -0700 Subject: Shutdown epi2 SNF 2007-08-15 06:41:31: Bottle Message-ID: Completed HCl bottle change From eenriquez at snf.stanford.edu Thu Aug 16 13:12:03 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Aug 2007 13:12:03 -0700 Subject: Comment epi2 SNF 2007-08-16 13:12:02: SiH4 update Message-ID: We will be leak checking the SiH4 from 7:30am until noon tomorrow (8/17). SiH4 will be available by noon on Monday. From eenriquez at snf.stanford.edu Fri Aug 17 07:43:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 07:43:08 -0700 Subject: Shutdown epi2 SNF 2007-08-17 07:43:08: SiH4 line leak check Message-ID: Verifying silane gas line vacuum integrity. Will be completed by noon. From eenriquez at snf.stanford.edu Fri Aug 17 10:26:29 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 10:26:29 -0700 Subject: Comment epi2 SNF 2007-08-17 10:26:28: SiH4 leak check update Message-ID: Leak has been delayed. System will not be ready until 2:30pm From eenriquez at snf.stanford.edu Fri Aug 17 13:56:41 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:56:41 -0700 Subject: Shutdown epi2 SNF 2007-08-17 07:43:08: SiH4 line leak check Message-ID: Completed SiH4 gas line leak check. From eenriquez at snf.stanford.edu Fri Aug 17 13:56:49 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:56:49 -0700 Subject: Comment epi2 SNF 2007-08-17 10:26:28: SiH4 leak check update Message-ID: Completed SiH4 gas line leak check. From eenriquez at snf.stanford.edu Fri Aug 17 13:57:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:57:04 -0700 Subject: Comment epi2 SNF 2007-08-16 13:12:02: SiH4 update Message-ID: Completed SiH4 gas line leak check. From eenriquez at snf.stanford.edu Fri Aug 17 13:57:17 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:57:17 -0700 Subject: Comment epi2 SNF 2007-08-10 09:22:58: SiH4 Line Message-ID: Completed SiH4 gas line leak check. From eenriquez at snf.stanford.edu Mon Aug 20 13:56:29 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Aug 2007 13:56:29 -0700 Subject: Comment epi2 SNF 2007-08-20 13:56:29: Silane is now available Message-ID: From yuhykr at snf.stanford.edu Wed Aug 22 18:30:53 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Wed, 22 Aug 2007 18:30:53 -0700 Subject: Problem epi2 SNF 2007-08-22 18:30:52: pressure setup point deviation failure Message-ID: From eenriquez at snf.stanford.edu Thu Aug 23 08:57:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:57:54 -0700 Subject: Problem epi2 SNF 2007-08-22 18:30:52: pressure setup point deviation failure Message-ID: The booster pump part of the vacuum pump assembly shutdown because of a transient inverter fault. Restarted the booter pump. Will continue to monitor if problem reoccurs. From jrjain at snf.stanford.edu Thu Aug 23 20:22:42 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 23 Aug 2007 20:22:42 -0700 Subject: Problem epi2 SNF 2007-08-23 20:22:39: Repeat Pressure Fault Message-ID: Chamber A Pressure Setpoint Deviation Fault received on a recipe that has been run successfully many times. From jrjain at snf.stanford.edu Thu Aug 23 20:46:03 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 23 Aug 2007 20:46:03 -0700 Subject: Problem epi2 SNF 2007-08-23 20:46:02: 2nd Pressure Fault Message-ID: Tried rerunning recipe but received pressure fault again. Setpoint was 15Torr, actual was 45Torr. From jrjain at snf.stanford.edu Thu Aug 23 20:55:03 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 23 Aug 2007 20:55:03 -0700 Subject: Shutdown epi2 SNF 2007-08-23 20:55:02: Recurring pressure fault problem Message-ID: From eenriquez at snf.stanford.edu Fri Aug 24 08:06:17 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:06:17 -0700 Subject: Comment epi2 SNF 2007-08-24 08:06:16: Pressure fault update Message-ID: Same vacuum pump fault as yesterday. The booster pump shutdown under load. Will continue troubleshooting problem. From eenriquez at snf.stanford.edu Fri Aug 24 11:14:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 11:14:34 -0700 Subject: Comment epi2 SNF 2007-08-24 11:14:33: Pressure fault update Message-ID: Ran a 15 min pump purge and power cycled the pump assembly. Maurice will run a test. From maurice at snf.stanford.edu Fri Aug 24 11:40:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 11:40:23 -0700 Subject: Shutdown epi2 SNF 2007-08-23 20:55:02: Recurring pressure fault problem Message-ID: Possible inverer issue on the pump. Pump purged. Pump shutdown to reset inverter. Pump turned back on. Several run were processed. Pump ok for now. Will continue to observe. If it happens again, pump will be pulled and sent to FMG to replace the inverter. From eenriquez at snf.stanford.edu Mon Aug 27 08:39:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Aug 2007 08:39:54 -0700 Subject: Comment epi2 SNF 2007-08-24 08:06:16: Pressure fault update Message-ID: see latest update From eenriquez at snf.stanford.edu Mon Aug 27 08:45:16 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Aug 2007 08:45:16 -0700 Subject: Comment epi2 SNF 2007-08-27 08:45:15: Pressure fault update Message-ID: Pump did not have any faults after Maurices' test and thoughout the weekend. We'll continue to monitor. If we have another occurance of the inverter fault, vendor will come in to help troubleshoot. From eenriquez at snf.stanford.edu Mon Aug 27 08:45:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Aug 2007 08:45:28 -0700 Subject: Comment epi2 SNF 2007-08-24 11:14:33: Pressure fault update Message-ID: See latest update. From yuhykr at snf.stanford.edu Tue Aug 28 00:06:41 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Tue, 28 Aug 2007 00:06:41 -0700 Subject: Shutdown epi2 SNF 2007-08-28 00:06:41: Gas pannel opened fault Message-ID: Gas Pannel Opened fault Main H2 supply exceeds main N2 supply error go to offline From eenriquez at snf.stanford.edu Tue Aug 28 12:58:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Aug 2007 12:58:08 -0700 Subject: Shutdown epi2 SNF 2007-08-28 00:06:41: Gas pannel opened fault Message-ID: Increased system N2 pressure from 27 psi to 31. Increased H2 pressure to ~30 psi. Also had lower the CDA pressure from 105 to 80 psi. Left system in Hot idle. From eenriquez at snf.stanford.edu Wed Aug 29 09:20:03 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Aug 2007 09:20:03 -0700 Subject: Shutdown epi2 SNF 2007-08-29 09:20:02: HCl cylinder change Message-ID: From eenriquez at snf.stanford.edu Wed Aug 29 12:58:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Aug 2007 12:58:04 -0700 Subject: Shutdown epi2 SNF 2007-08-29 09:20:02: HCl cylinder change Message-ID: Completed HCl cylinder change. From gunjim at snf.stanford.edu Wed Aug 29 16:25:23 2007 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Wed, 29 Aug 2007 16:25:23 -0700 Subject: Problem epi2 SNF 2007-08-29 16:25:23: Aborted with fatal fault Message-ID: "Chamber A lower temp setpoint deviation fault" during stabilixation step. Aborted and showed "Fatal fault of wafer from LLA slot 1","Chamber A is not ready to send a wafer". The recipe step which aborted had no problem running before. From yuhykr at snf.stanford.edu Wed Aug 29 22:56:03 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Wed, 29 Aug 2007 22:56:03 -0700 Subject: Shutdown epi2 SNF 2007-08-29 22:56:03: load lock stepper failure /set-up pressure problem again Message-ID: During my recipe running, I monitored pressure is much higher than my set-up pressure(45torr comparing my set-up point 30torr) Sorry My wafer is inside because of LL A stepper failure From eenriquez at snf.stanford.edu Thu Aug 30 08:57:02 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Aug 2007 08:57:02 -0700 Subject: Comment epi2 SNF 2007-08-30 08:57:00: Update pressure fault Message-ID: Vacuum pump had another inverter fault. Vendor will be in around 1 pm to troubleshoot the problem. From eenriquez at snf.stanford.edu Thu Aug 30 14:43:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Aug 2007 14:43:55 -0700 Subject: Shutdown epi2 SNF 2007-08-29 22:56:03: load lock stepper failure /set-up pressure problem again Message-ID: Recovered user's wafer. Vendor replaced the inverter. Will continue to monitor the pressure problem. Vendor might need to tune the inverter settings if we have another pressure fault. From eenriquez at snf.stanford.edu Thu Aug 30 14:44:13 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Aug 2007 14:44:13 -0700 Subject: Comment epi2 SNF 2007-08-30 08:57:00: Update pressure fault Message-ID: Recovered user's wafer. Vendor replaced the inverter. Will continue to monitor the pressure problem. Vendor might need to tune the inverter settings if we have another pressure fault. From eenriquez at snf.stanford.edu Thu Aug 30 14:44:22 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Aug 2007 14:44:22 -0700 Subject: Comment epi2 SNF 2007-08-27 08:45:15: Pressure fault update Message-ID: Recovered user's wafer. Vendor replaced the inverter. Will continue to monitor the pressure problem. Vendor might need to tune the inverter settings if we have another pressure fault. From eenriquez at snf.stanford.edu Thu Aug 30 14:44:32 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Aug 2007 14:44:32 -0700 Subject: Problem epi2 SNF 2007-08-29 16:25:23: Aborted with fatal fault Message-ID: Recovered user's wafer. Vendor replaced the inverter. Will continue to monitor the pressure problem. Vendor might need to tune the inverter settings if we have another pressure fault. From maurice at snf.stanford.edu Thu Aug 30 15:37:25 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Aug 2007 15:37:25 -0700 Subject: Shutdown epi2 SNF 2007-08-30 15:37:24: LL pump off Message-ID: temp warning From eenriquez at snf.stanford.edu Fri Aug 31 09:40:05 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Aug 2007 09:40:05 -0700 Subject: Comment epi2 SNF 2007-08-31 09:40:00: Update LL pump off Message-ID: LL A appears to be having a problem with the pump interface box. Will continue to troubleshoot. Maurice will test LL B by 11am to see if we could run out of LL B without any problems. From eenriquez at snf.stanford.edu Fri Aug 31 11:26:14 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Aug 2007 11:26:14 -0700 Subject: Shutdown epi2 SNF 2007-08-30 15:37:24: LL pump off Message-ID: Reset pump communication to the system. Tested load lock with no problems. From eenriquez at snf.stanford.edu Fri Aug 31 11:26:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Aug 2007 11:26:21 -0700 Subject: Comment epi2 SNF 2007-08-31 09:40:00: Update LL pump off Message-ID: Reset pump communication to the system. Tested load lock with no problems. From maurice at snf.stanford.edu Fri Aug 31 16:24:20 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Aug 2007 16:24:20 -0700 Subject: Comment epi2 SNF 2007-08-20 13:56:29: Silane is now available Message-ID: logged From maurice at snf.stanford.edu Fri Aug 31 16:24:47 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Aug 2007 16:24:47 -0700 Subject: Problem epi2 SNF 2007-08-23 20:46:02: 2nd Pressure Fault Message-ID: Inverter on pump replaced by vendor From maurice at snf.stanford.edu Fri Aug 31 16:25:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Aug 2007 16:25:05 -0700 Subject: Problem epi2 SNF 2007-08-23 20:22:39: Repeat Pressure Fault Message-ID: Vendor replaced inverter on pump