Shutdown epi2 SNF 2007-08-01 09:50:06: pump error

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Aug 8 13:50:26 PDT 2007


Installed dry pump and at local mode, tried turning on pump bbut it shut down itself  and tripped the 30amp circuit breaker
on main remote box, found one the three phase ac input
power inside the junction (down in the basement) shorted
to ground due to a bad connection causing it to arc. re-do
ac wire connection with new wire nut connector.  turn on
w/out problem. put system chamber a on idle mode and
recovered wafer inside the chamber.




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