Problem epi2 SNF 2007-08-09 18:20:43: LLA door

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Aug 9 18:20:44 PDT 2007


Ran one wafer with success... on second wafer the LLA door would not shut. I tried many combinations of commands to try to clear the current state and close door... giving up now.




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