Shutdown epi2 SNF 2007-08-09 18:36:39: Previous user's problem

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Aug 9 18:36:39 PDT 2007


Closed Load Lock A door.  LLA is still under atmospheric pressure and needs to be pumped down before wafer can be moved from transfer chamber to cassette.
- Raja (jrjain)




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