Problem epi2 SNF 2007-08-22 18:30:52: pressure setup point deviation failure
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Aug 23 08:57:54 PDT 2007
The booster pump part of the vacuum pump assembly shutdown because of a transient inverter fault. Restarted the booter pump. Will continue to monitor if problem reoccurs.
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