Problem epi2 SNF 2007-08-23 20:46:02: 2nd Pressure Fault

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Aug 23 20:46:03 PDT 2007


Tried rerunning recipe but received pressure fault again.  Setpoint was 15Torr, actual was 45Torr.




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