Problem epi2 SNF 2007-08-29 16:25:23: Aborted with fatal fault

gunjim at snf.stanford.edu gunjim at snf.stanford.edu
Wed Aug 29 16:25:23 PDT 2007


"Chamber A lower temp setpoint deviation fault" during stabilixation step. Aborted and showed "Fatal fault of wafer from LLA slot 1","Chamber A is not ready to send a wafer". The recipe step which aborted had no problem running before.




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