Shutdown epi2 SNF 2007-08-29 22:56:03: load lock stepper failure /set-up pressure problem again

yuhykr at snf.stanford.edu yuhykr at snf.stanford.edu
Wed Aug 29 22:56:03 PDT 2007


During my recipe running, I monitored pressure is much higher than my set-up pressure(45torr comparing my set-up point 30torr)
Sorry 
My wafer is inside because of LL A stepper failure




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