Shutdown epi2 SNF 2007-08-29 22:56:03: load lock stepper failure /set-up pressure problem again

yuhykr at yuhykr at
Wed Aug 29 22:56:03 PDT 2007

During my recipe running, I monitored pressure is much higher than my set-up pressure(45torr comparing my set-up point 30torr)
My wafer is inside because of LL A stepper failure

More information about the epi2-pcs mailing list