Shutdown epi2 SNF 2007-08-29 22:56:03: load lock stepper failure /set-up pressure problem again

[yuhykr at snf.stanford.edu]

During my recipe running, I monitored pressure is much higher than my set-up pressure(45torr comparing my set-up point 30torr)
Sorry 
My wafer is inside because of LL A stepper failure