Comment epi2 SNF 2007-08-30 08:57:00: Update pressure fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 30 14:44:13 PDT 2007


Recovered user's wafer.  Vendor replaced the inverter.  Will continue to monitor the pressure problem.  Vendor might need to tune the inverter settings if we have another pressure fault.




More information about the epi2-pcs mailing list