Problem epi2 SNF 2007-08-29 16:25:23: Aborted with fatal fault

eenriquez at eenriquez at
Thu Aug 30 14:44:32 PDT 2007

Recovered user's wafer.  Vendor replaced the inverter.  Will continue to monitor the pressure problem.  Vendor might need to tune the inverter settings if we have another pressure fault.

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