From maurice at snf.stanford.edu Mon Dec 3 14:52:47 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 3 Dec 2007 14:52:47 -0800 Subject: Comment epi2 SNF 2007-12-03 14:52:47: 12/3/07 update Message-ID: We have recieved the parts back that needed fire polishing. We are still waiting for susceptor support fingers. Elmer is going to LP Glass in the early morning to verify that they have the correct fingers. Elmer is also ordering a new susceptor. The new one that was put in the system last week was chipped when the wafer pin struck. From maurice at snf.stanford.edu Fri Dec 7 11:38:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Dec 2007 11:38:57 -0800 Subject: Comment epi2 SNF 2007-12-07 11:38:57: epi2 update 12/7/07 Message-ID: Wafer support fingers have arrived! System has been put back together and is baking at 700c. We will do a leak rate test, run a couple of etches and then start running processes to check for haze. From maurice at snf.stanford.edu Fri Dec 7 14:21:18 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Dec 2007 14:21:18 -0800 Subject: Shutdown epi2 SNF 2007-12-07 14:21:17: wafer stuck on blade Message-ID: From maurice at snf.stanford.edu Fri Dec 7 14:47:40 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Dec 2007 14:47:40 -0800 Subject: Comment epi2 SNF 2007-12-07 14:47:40: epi2 update 12/7/07 ver2 Message-ID: Wafer is not transfering off blade and onto susceptor. We will have to open up system, pull out the susceptor and check the orientaion of the wafer pin lift. System will be down for the weekend. From eenriquez at snf.stanford.edu Mon Dec 10 14:47:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Dec 2007 14:47:37 -0800 Subject: Comment epi2 SNF 2007-12-10 14:47:37: Update Message-ID: Adjusted the pin lifter orientation. Installed correct size pins. Now need to adjust the pin position sensor. From eenriquez at snf.stanford.edu Tue Dec 11 10:00:38 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:00:38 -0800 Subject: Shutdown epi2 SNF 2007-12-07 14:21:17: wafer stuck on blade Message-ID: Installed the correct pins and adjusted the lift pin position sensor. Cycled wafers in and out of the process chamber with no problems. From eenriquez at snf.stanford.edu Tue Dec 11 10:00:52 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:00:52 -0800 Subject: Comment epi2 SNF 2007-12-10 14:47:37: Update Message-ID: Installed the correct pins and adjusted the lift pin position sensor. Cycled wafers in and out of the process chamber with no problems. From eenriquez at snf.stanford.edu Tue Dec 11 10:11:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:11:18 -0800 Subject: Shutdown epi2 SNF 2007-11-28 18:04:22: Haze Message-ID: Chamber had a high leak rate (about >500 mT/min). Tightened down the dome clamp to 30 ft-lbs from 25 ft-lbs of torque. Leak rate is about 20 mT/min. From eenriquez at snf.stanford.edu Tue Dec 11 10:13:02 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:13:02 -0800 Subject: Shutdown epi2 SNF 2007-11-29 10:45:19: Broken wafer pin lifter/blade Message-ID: Installed the correct pins and adjusted the lift pin position sensor. Also replaced the blade. Cycled wafers in and out of the process chamber with no problems. Need help from a user to run a process qual. From eenriquez at snf.stanford.edu Tue Dec 11 10:13:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:13:37 -0800 Subject: Comment epi2 SNF 2007-11-15 10:18:18: Changed HCl cylinder Message-ID: From eenriquez at snf.stanford.edu Tue Dec 11 10:14:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:14:18 -0800 Subject: Comment epi2 SNF 2007-11-21 08:46:54: Susceptor coated; Dome OK Message-ID: Replaced the susceptor and cleaned the dome. From eenriquez at snf.stanford.edu Tue Dec 11 10:14:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:14:58 -0800 Subject: Comment epi2 SNF 2007-11-26 14:50:07: Update on susceptor change Message-ID: Repair has been completed. From eenriquez at snf.stanford.edu Tue Dec 11 10:16:57 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:16:57 -0800 Subject: Comment epi2 SNF 2007-11-27 14:41:44: Update on susceptor change Message-ID: Spare dome needed to be repaired. Cleaned and reinstalled the old dome From eenriquez at snf.stanford.edu Tue Dec 11 10:17:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:17:54 -0800 Subject: Comment epi2 SNF 2007-12-07 11:38:57: epi2 update 12/7/07 Message-ID: Repired has been completed. Needs a process qual. From eenriquez at snf.stanford.edu Tue Dec 11 10:18:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:18:40 -0800 Subject: Comment epi2 SNF 2007-12-07 14:47:40: epi2 update 12/7/07 ver2 Message-ID: Repired has been completed. Needs a process qual. From eenriquez at snf.stanford.edu Tue Dec 11 10:21:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Dec 2007 10:21:21 -0800 Subject: Comment epi2 SNF 2007-12-03 14:52:47: 12/3/07 update Message-ID: Repired has been completed. Needs a process qual. From mdickey at snf.stanford.edu Mon Dec 17 06:23:29 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Dec 2007 06:23:29 -0800 Subject: Problem epi2 SNF 2007-12-17 06:23:27: HCL Message-ID: Needs HCL bottle change From eenriquez at snf.stanford.edu Mon Dec 17 08:34:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Dec 2007 08:34:55 -0800 Subject: Problem epi2 SNF 2007-12-17 06:23:27: HCL Message-ID: Completed HCl cylinder change. From kennyhsu at snf.stanford.edu Tue Dec 18 21:01:17 2007 From: kennyhsu at snf.stanford.edu (kennyhsu at snf.stanford.edu) Date: Tue, 18 Dec 2007 21:01:17 -0800 Subject: Problem epi2 SNF 2007-12-18 21:01:17: Temperature controller problem Message-ID: After a bit of use the Epi began to give a lower temperature deviation problem when it was cooled from 1000C to 750C