Comment epi2 SNF 2007-12-07 14:47:40: epi2 update 12/7/07 ver2

maurice at maurice at
Fri Dec 7 14:47:40 PST 2007

Wafer is not transfering off blade and onto susceptor.  We will have to open up system, pull out the susceptor and check the orientaion of the wafer pin lift.
System will be down for the weekend.

More information about the epi2-pcs mailing list