Shutdown epi2 SNF 2007-12-07 14:21:17: wafer stuck on blade

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 11 10:00:38 PST 2007


Installed the correct pins and adjusted the lift pin position sensor.  Cycled wafers in and out of the process chamber with no problems.




More information about the epi2-pcs mailing list