Shutdown epi2 SNF 2007-11-28 18:04:22: Haze
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Dec 11 10:11:18 PST 2007
Chamber had a high leak rate (about >500 mT/min). Tightened down the dome clamp to 30 ft-lbs from 25 ft-lbs of torque. Leak rate is about 20 mT/min.
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