Shutdown epi2 SNF 2007-11-29 10:45:19: Broken wafer pin lifter/blade

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 11 10:13:02 PST 2007


Installed the correct pins and adjusted the lift pin position sensor.  Also replaced the blade. Cycled wafers in and out of the process chamber with no problems.  Need help from a user to run a process qual.




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